@misc{indiciaec815904cdf51,
  title = {Dynamic Imaging of Periodic Structures using Extreme Ultraviolet Scatterometry},
  author = {Brendan McBennett and Michael Tanksalvala and Emma E. Nelson and Theodore H. Culman and Yunhao Li and Jiayi Liu and Ethan Berk and Albert Beardo and James Harford and Justin Shaw and Henry C. Kapteyn and Margaret M. Murnane and Joshua L. Knobloch},
  year = {2025},
  doi = {10.1103/py1n-pg79},
  url = {https://arxiv.org/abs/2512.19940},
  note = {Source identifier: 2512.19940}
}