@misc{indiciaefd0884b714d6,
  title = {MaskOpt: A Large-Scale Mask Optimization Dataset to Advance AI in Integrated Circuit Manufacturing},
  author = {Yuting Hu and Lei Zhuang and Hua Xiang and Jinjun Xiong and Gi-Joon Nam},
  year = {2025},
  url = {https://arxiv.org/abs/2512.20655},
  note = {Source identifier: 2512.20655}
}