TY  - RPRT
TI  - MaskOpt: A Large-Scale Mask Optimization Dataset to Advance AI in Integrated Circuit Manufacturing
AU  - Yuting Hu
AU  - Lei Zhuang
AU  - Hua Xiang
AU  - Jinjun Xiong
AU  - Gi-Joon Nam
PY  - 2025
UR  - https://arxiv.org/abs/2512.20655
ID  - 2512.20655
ER  -