@misc{indiciaebc7ef087cd73,
  title = {Channel-last gate-all-around nanosheet oxide semiconductor transistors},
  author = {Fabia F. Athena and Xiangjin Wu and Nathaniel S. Safron and Amy Siobhan McKeown-Green and Mauro Dossena and Jack C. Evans and Jonathan Hartanto and Yukio Cho and Donglai Zhong and Tara Peña and Paweł Czaja and Parivash Moradifar and Paul C. McIntyre and Mathieu Luisier and Yi Cui and Jennifer A. Dionne and Greg Pitner and Iuliana P. Radu and Eric Pop and Alberto Salleo and H. -S. Philip Wong},
  year = {2025},
  url = {https://arxiv.org/abs/2512.21330},
  note = {Source identifier: 2512.21330}
}