@misc{indiciae96ba029c11d3,
  title = {Hf/Zr Superlattice-Based High-\textbackslash{}k\{appa\} Gate Dielectrics with Dipole Layer Engineering for Advanced CMOS},
  author = {Taeyoung Song and Sanghyun Kang and Yu Hsin Kuo and Jiayi Chen and Lance Fernandes and Nashrah Afroze and Mengkun Tian and Hyoung Won Baac and Changhwan Shin and Asif Islam Khan},
  year = {2025},
  url = {https://arxiv.org/abs/2512.22505},
  note = {Source identifier: 2512.22505}
}