TY  - RPRT
TI  - Hf/Zr Superlattice-Based High-\k{appa} Gate Dielectrics with Dipole Layer Engineering for Advanced CMOS
AU  - Taeyoung Song
AU  - Sanghyun Kang
AU  - Yu Hsin Kuo
AU  - Jiayi Chen
AU  - Lance Fernandes
AU  - Nashrah Afroze
AU  - Mengkun Tian
AU  - Hyoung Won Baac
AU  - Changhwan Shin
AU  - Asif Islam Khan
PY  - 2025
UR  - https://arxiv.org/abs/2512.22505
ID  - 2512.22505
ER  -