@misc{indiciae2c17d85380c0, title = {AgenticTCAD: A LLM-based Multi-Agent Framework for Automated TCAD Code Generation and Device Optimization}, author = {Guangxi Fan and Tianliang Ma and Xuguang Sun and Xun Wang and Kain Lu Low and Leilai Shao}, year = {2026}, url = {https://arxiv.org/abs/2512.23742}, note = {Source identifier: 2512.23742} }