@misc{indiciae71125e32739d,
  title = {Wafer-Scale Integration of Piezo- and Ferroelectric Al0.64Sc0.36N Thin Films by Reactive Sputtering},
  author = {Sanjay Nayak and Venkata Raveendra Nallagatla and Ravindra Singh Bisht and Dmytro Solonenko and Demian Henzen and Washim Reza Ali and Carla Maria Lazzari and Robert JW Frost and Andrea Serafini and Davide Codegoni and Amalia Balsamo and Rossana Scaldaferri and Elaheh Allahyari and Anirban Ghosh and Martin Kratzer and Andrea Picco and Sonia Costantini and Andrea Rusconi and Mohssen Moridi and Humberto Campanella and Marco Deluca and Annalisa De Pastina},
  year = {2025},
  url = {https://arxiv.org/abs/2512.24455},
  note = {Source identifier: 2512.24455}
}