TY - RPRT TI - A Liquid Density Sensor Based On AlN Piezoelectric Micromachined Ultrasonic Transmitter Insensitive to Liquid Viscosity AU - Xuecong Fu AU - Liang Lou AU - Hao Ren PY - 2026 UR - https://arxiv.org/abs/2601.01173 ID - 2601.01173 ER -