@misc{indiciae3cd36278668b, title = {Thermal conductance across bonded SiOx-SiOx interfaces in hybrid bonding process}, author = {Xingqiang Zhang and Liu Chang and Liyi Li and Zhe Cheng}, year = {2026}, url = {https://arxiv.org/abs/2601.03106}, note = {Source identifier: 2601.03106} }