@misc{indiciae1cb77a96498b, title = {Surface Optimization of Superconducting Aluminum Resonators for Robust Quantum Device Fabrication}, author = {Simon J. K. Lang and Ignaz Eisele and Alwin Maiwald and Emir Music and Luis Schwarzenbach and Carla Moran-Guizan and Johannes Weber and Daniela Zahn and Thomas Mayer and Rui N. Pereira and Christoph Kutter}, year = {2026}, doi = {10.1103/mwsd-q1zm}, url = {https://arxiv.org/abs/2601.04082}, note = {Source identifier: 2601.04082} }