@misc{indiciaefb2d1db76822,
  title = {Ultra-shallow EUV and soft X-ray gratings fabricated by broad-beam nitrogen ion irradiation},
  author = {Johannes Kaufmann and Thomas Siefke and Uwe Zeitner},
  year = {2026},
  url = {https://arxiv.org/abs/2601.04667},
  note = {Source identifier: 2601.04667}
}