TY  - RPRT
TI  - Ultra-shallow EUV and soft X-ray gratings fabricated by broad-beam nitrogen ion irradiation
AU  - Johannes Kaufmann
AU  - Thomas Siefke
AU  - Uwe Zeitner
PY  - 2026
UR  - https://arxiv.org/abs/2601.04667
ID  - 2601.04667
ER  -