@misc{indiciaebfaa79ada69d, title = {Physics-embedded neural computational electron microscopy for quantitative 4D nanometrology}, author = {Hao-Jin Wang and Liqun Shen and Xin-Ning Tian and Lei Lei and Kexin Wang and Grigore Moldovan and Marc-Georg Willinger and Zhu-Jun Wang}, year = {2026}, url = {https://arxiv.org/abs/2601.07311}, note = {Source identifier: 2601.07311} }