TY - RPRT TI - Physics-embedded neural computational electron microscopy for quantitative 4D nanometrology AU - Hao-Jin Wang AU - Liqun Shen AU - Xin-Ning Tian AU - Lei Lei AU - Kexin Wang AU - Grigore Moldovan AU - Marc-Georg Willinger AU - Zhu-Jun Wang PY - 2026 UR - https://arxiv.org/abs/2601.07311 ID - 2601.07311 ER -