@misc{indiciaec45941dc62ac,
  title = {Control of Electron Energy Distribution Functions by Current Waveform Tailoring in Inductively Coupled Radio Frequency Plasmas},
  author = {Zhaoyu Chen and Zili Chen and Yu Wang and Jonas Giesekus and Wei Jiang and Yonghua Ding and Donghui Xia and Ya Zhang and Julian Schulze},
  year = {2026},
  url = {https://arxiv.org/abs/2601.07386},
  note = {Source identifier: 2601.07386}
}