TY  - RPRT
TI  - Control of Electron Energy Distribution Functions by Current Waveform Tailoring in Inductively Coupled Radio Frequency Plasmas
AU  - Zhaoyu Chen
AU  - Zili Chen
AU  - Yu Wang
AU  - Jonas Giesekus
AU  - Wei Jiang
AU  - Yonghua Ding
AU  - Donghui Xia
AU  - Ya Zhang
AU  - Julian Schulze
PY  - 2026
UR  - https://arxiv.org/abs/2601.07386
ID  - 2601.07386
ER  -