@misc{indiciae4759cc83115e, title = {The effect of surface quenching coefficients of \$O\_2(a\textasciicircum{}\{1\}Δg)\$ and \$O\_2(b\textasciicircum{}\{1\}Σg\textasciicircum{}\{+\})\$ on capacitively coupled \$Ar\$/\$O\_2\$ discharge: A global/equivalent circuit model study}, author = {Wan Dong and Yi Wang and Yi-Fan Zhang and Yuan-Hong Song}, year = {2026}, url = {https://arxiv.org/abs/2601.08138}, note = {Source identifier: 2601.08138} }