TY - RPRT TI - The effect of surface quenching coefficients of $O_2(a^{1}Δg)$ and $O_2(b^{1}Σg^{+})$ on capacitively coupled $Ar$/$O_2$ discharge: A global/equivalent circuit model study AU - Wan Dong AU - Yi Wang AU - Yi-Fan Zhang AU - Yuan-Hong Song PY - 2026 UR - https://arxiv.org/abs/2601.08138 ID - 2601.08138 ER -