@misc{indiciae6089aa65a767,
  title = {A Generalizable Framework for Building Executable Domain-Specific LLMs under Data Scarcity: Demonstration on Semiconductor TCAD Simulation},
  author = {Di Wang and Zhenhua Wu and Yu Liu and Kai Chang and Shaohua Wu},
  year = {2026},
  doi = {10.1002/aisy.70520},
  url = {https://arxiv.org/abs/2601.10128},
  note = {Source identifier: 2601.10128}
}