TY  - RPRT
TI  - A Generalizable Framework for Building Executable Domain-Specific LLMs under Data Scarcity: Demonstration on Semiconductor TCAD Simulation
AU  - Di Wang
AU  - Zhenhua Wu
AU  - Yu Liu
AU  - Kai Chang
AU  - Shaohua Wu
PY  - 2026
DO  - 10.1002/aisy.70520
UR  - https://arxiv.org/abs/2601.10128
ID  - 2601.10128
ER  -