@misc{indiciae1ffebea24cda,
  title = {Transition Metal Dichalcogenide MoS\$\{\}\_2\$: oxygen and fluorine functionalization for selective plasma processing},
  author = {Yury Polyachenko and Yuri Barsukov and Shoaib Khalid and Igor Kaganovich},
  year = {2026},
  doi = {10.1021/acs.jpclett.6c00348},
  url = {https://arxiv.org/abs/2601.11891},
  note = {Source identifier: 2601.11891}
}