TY  - RPRT
TI  - Transition Metal Dichalcogenide MoS${}_2$: oxygen and fluorine functionalization for selective plasma processing
AU  - Yury Polyachenko
AU  - Yuri Barsukov
AU  - Shoaib Khalid
AU  - Igor Kaganovich
PY  - 2026
DO  - 10.1021/acs.jpclett.6c00348
UR  - https://arxiv.org/abs/2601.11891
ID  - 2601.11891
ER  -