@misc{indiciaee76741abd72c,
  title = {Oxygen atom density and kinetics in intermediate-pressure radiofrequency capacitively-coupled plasmas in pure O2},
  author = {Shu Zhang and Andrey Volynets and Garrett A. Curley and Jean-Paul Booth},
  year = {2026},
  url = {https://arxiv.org/abs/2601.13067},
  note = {Source identifier: 2601.13067}
}