TY  - RPRT
TI  - Oxygen atom density and kinetics in intermediate-pressure radiofrequency capacitively-coupled plasmas in pure O2
AU  - Shu Zhang
AU  - Andrey Volynets
AU  - Garrett A. Curley
AU  - Jean-Paul Booth
PY  - 2026
UR  - https://arxiv.org/abs/2601.13067
ID  - 2601.13067
ER  -