@misc{indiciaec4c91dd1a4f2,
  title = {Facile Optimization of Combinatorial Sputtering Processes with Arbitrary Numbers of Components for Targeted Compositions},
  author = {Shelby Sutton Fields and Christopher David White and Keith Knipling and Steven Bennett},
  year = {2026},
  doi = {10.1063/5.0303021},
  url = {https://arxiv.org/abs/2601.16055},
  note = {Source identifier: 2601.16055}
}