TY - RPRT TI - Facile Optimization of Combinatorial Sputtering Processes with Arbitrary Numbers of Components for Targeted Compositions AU - Shelby Sutton Fields AU - Christopher David White AU - Keith Knipling AU - Steven Bennett PY - 2026 DO - 10.1063/5.0303021 UR - https://arxiv.org/abs/2601.16055 ID - 2601.16055 ER -