@misc{indiciae7499a8a2991a, title = {Low-Loss, High-Coherence Airbridge Interconnects Fabricated by Single-Step Lithography}, author = {Jibang Fu and Bo Ren and Jiandong Ouyang and Cong Li and Kechengqi Zhu and Yonggang Che and Xiang Fu and Shichuan Xue and Zhaohua Yang and Mingtang Deng and Junjie Wu}, year = {2026}, url = {https://arxiv.org/abs/2601.16416}, note = {Source identifier: 2601.16416} }