TY  - RPRT
TI  - Towards Self-Optimizing Electron Microscope: Robust Tuning of Aberration Coefficients via Physics-Aware Multi-Objective Bayesian Optimization
AU  - Utkarsh Pratiush
AU  - Austin Houston
AU  - Richard Liu
AU  - Gerd Duscher
AU  - Sergei Kalinin
PY  - 2026
UR  - https://arxiv.org/abs/2601.18972
ID  - 2601.18972
ER  -