@misc{indiciaed0b5bcbbefbe, title = {Krypton-sputtered tantalum films for scalable high-performance quantum devices}, author = {Maciej W. Olszewski and Lingda Kong and Simon Reinhardt and Daniel Tong and Xinyi Du and Gabriele Di Gianluca and Haoran Lu and Saswata Roy and Luojia Zhang and Aleksandra B. Biedron and David A. Muller and Valla Fatemi}, year = {2026}, doi = {10.1038/s41563-026-02718-z}, url = {https://arxiv.org/abs/2601.20091}, note = {Source identifier: 2601.20091} }