@misc{indiciae69c809d7bb31,
  title = {Impact of O concentration on the thermal stability and decomposition mechanism of (Cr,Al)N compared to (Ti,Al)N thin films},
  author = {Pauline Kümmerl and Ganesh Kumar Nayak and Felix Leinenbach and Zsolt Czigány and Daniel Primetzhofer and Szilárd Kolozsvári and Peter Polcik and Marcus Hans and Jochen M. Schneider},
  year = {2026},
  url = {https://arxiv.org/abs/2601.20691},
  note = {Source identifier: 2601.20691}
}