TY - RPRT TI - Novel non-thermal Ablation Mechanics in the Laser Ablation of Silicon AU - Dominic Klein AU - Simon Kümmel AU - Johannes Roth PY - 2026 DO - 10.1007/978-3-031-91312-9_10 UR - https://arxiv.org/abs/2602.06099 ID - 2602.06099 ER -