@misc{indiciae74c741fd978f,
  title = {Burst-mode fs-laser direct writing for full-thickness oxidation of Ta thin films},
  author = {Lina Grineviciute and Hsin-Hui Huang and Haoran Mu and Nguyen Hoai An Le and Andrew Siao Ming Ang and Dan Kapsaskis and Tomas Katkus and Saulius Juodkazis},
  year = {2026},
  url = {https://arxiv.org/abs/2602.06444},
  note = {Source identifier: 2602.06444}
}