TY  - RPRT
TI  - Burst-mode fs-laser direct writing for full-thickness oxidation of Ta thin films
AU  - Lina Grineviciute
AU  - Hsin-Hui Huang
AU  - Haoran Mu
AU  - Nguyen Hoai An Le
AU  - Andrew Siao Ming Ang
AU  - Dan Kapsaskis
AU  - Tomas Katkus
AU  - Saulius Juodkazis
PY  - 2026
UR  - https://arxiv.org/abs/2602.06444
ID  - 2602.06444
ER  -