@misc{indiciaec1eef0befe5c,
  title = {Thermoelastic surface acoustic waves in low-loss silicon nitride integrated circuits},
  author = {Zheng Zheng and Ahmet Tarık Işık and Akshay Keloth and Kaixuan Ye and Peter van der Slot and David Marpaung},
  year = {2026},
  url = {https://arxiv.org/abs/2602.06732},
  note = {Source identifier: 2602.06732}
}