TY  - RPRT
TI  - Thermoelastic surface acoustic waves in low-loss silicon nitride integrated circuits
AU  - Zheng Zheng
AU  - Ahmet Tarık Işık
AU  - Akshay Keloth
AU  - Kaixuan Ye
AU  - Peter van der Slot
AU  - David Marpaung
PY  - 2026
UR  - https://arxiv.org/abs/2602.06732
ID  - 2602.06732
ER  -