@misc{indiciaeea59ba0480a3, title = {Damage accumulation induced metal-insulator transition through ion implantation of ScN thin films}, author = {Charlotte Poterie and Marc Marteau and Per Eklund and Thierry Cabioch and Jean-Francois Barbot and Arnaud le Febvrier}, year = {2026}, url = {https://arxiv.org/abs/2602.06757}, note = {Source identifier: 2602.06757} }