@misc{indiciaee7b67cebc488,
  title = {Spatial homogeneity of superconducting order parameter in NbN films grown by atomic layer deposition},
  author = {J. Lorenz and S. Linzen and M. Ziegler and G. Oelsner and R. Stolz and F. S. Tautz and F. Lüpke and E. Il'ichev},
  year = {2026},
  doi = {10.1088/1361-6668/ae7838},
  url = {https://arxiv.org/abs/2602.10839},
  note = {Source identifier: 2602.10839}
}