@misc{indiciae23578a3b886b, title = {Hybrid Femtosecond Laser and Ion-Implantation Processing for Controlled, Deep, High-Efficiency Ablation in Fused Silica}, author = {Mario Garcia-Lechuga and Yoann Levy and Irene Solana and Fatima Cabello and Maria Dolores Ynsa and Nadezhda M. Bulgakova}, year = {2026}, url = {https://arxiv.org/abs/2602.13127}, note = {Source identifier: 2602.13127} }