TY  - RPRT
TI  - Hybrid Femtosecond Laser and Ion-Implantation Processing for Controlled, Deep, High-Efficiency Ablation in Fused Silica
AU  - Mario Garcia-Lechuga
AU  - Yoann Levy
AU  - Irene Solana
AU  - Fatima Cabello
AU  - Maria Dolores Ynsa
AU  - Nadezhda M. Bulgakova
PY  - 2026
UR  - https://arxiv.org/abs/2602.13127
ID  - 2602.13127
ER  -