@misc{indiciaebf3e8601f4b0,
  title = {Transforming Computational Lithography with AC and AI -- Faster, More Accurate, and Energy-efficient},
  author = {Saumyadip Mukhopadhyay and Kiho Yang and Kasyap Thottasserymana Vasudevan and Mounica Jyothi Divvela and Selim Dogru and Dilip Krishnamurthy and Fergo Treska and Werner Gillijns and Ryan Ryoung han Kim and Kumara Sastry and Vivek Singh},
  year = {2026},
  url = {https://arxiv.org/abs/2602.15036},
  note = {Source identifier: 2602.15036}
}