@misc{indiciaecd8af6e46579, title = {PRISM: Photonics-Informed Inverse Lithography for Manufacturable Inverse-Designed Photonic Integrated Circuits}, author = {Hongjian Zhou and Haoyu Yang and Nicholas Gangi and Tianle Xu and Rena Huang and Jiaqi Gu}, year = {2026}, url = {https://arxiv.org/abs/2602.15762}, note = {Source identifier: 2602.15762} }