@misc{indiciae8a8487f6afcd,
  title = {Piezoelectric MEMS Phase Modulator for Silicon Nitride Platform in the Visible Spectrum},
  author = {Firehun T. Dullo and Paul C. Thrane and Nikhil Jayakumar and Zeljko Skokic and Christopher A. Dirdal and Jo Gjessing and Balpreet S. Ahluwalia},
  year = {2026},
  url = {https://arxiv.org/abs/2602.16577},
  note = {Source identifier: 2602.16577}
}