@misc{indiciae3b18b6347346, title = {Graphene FET Process and Analysis Optimization in 200 mm Pilot Line Environment}, author = {Anton Murros and Miika Soikkeli and Anni Virta and Arantxa Maestre and Leire Morillo and Alba Centeno and Amaia Zurutuza and Olli-Pekka Kilpi}, year = {2026}, url = {https://arxiv.org/abs/2602.17135}, note = {Source identifier: 2602.17135} }