@misc{indiciaed48ebd0e8fb6,
  title = {Effect of oxygen content on optical, structural, and dielectric properties of Al\$\_x\$Ta\$\_y\$O\$\_z\$\$ thin films},
  author = {Pavel Ondračka and Richard Drevet and Daniel Franta and Jan Dvořák and Ivan Ohlídal and Petr Vašina},
  year = {2026},
  url = {https://arxiv.org/abs/2602.17302},
  note = {Source identifier: 2602.17302}
}