@misc{indiciaec87233b01dc1,
  title = {Tuning of Atomic Layer Deposition Pulse Time through Physics-Informed Bayesian Active Learning},
  author = {Pouyan Navabi and Christos G. Takoudis},
  year = {2026},
  doi = {10.1116/6.0005430},
  url = {https://arxiv.org/abs/2602.18565},
  note = {Source identifier: 2602.18565}
}