TY  - RPRT
TI  - Tuning of Atomic Layer Deposition Pulse Time through Physics-Informed Bayesian Active Learning
AU  - Pouyan Navabi
AU  - Christos G. Takoudis
PY  - 2026
DO  - 10.1116/6.0005430
UR  - https://arxiv.org/abs/2602.18565
ID  - 2602.18565
ER  -