@misc{indiciae330152171a5e,
  title = {Pushing the Limits of Inverse Lithography with Generative Reinforcement Learning},
  author = {Haoyu Yang and Haoxing Ren},
  year = {2026},
  url = {https://arxiv.org/abs/2602.19027},
  note = {Source identifier: 2602.19027}
}