@misc{indiciaea8b9ad58b1d3, title = {Designing electrostatic MEMS-based electron optics: the case of the spiral phase plate}, author = {Payam Habibdazeh Kavkani and Amir H. Tavabi and Paolo Rosi and Alberto Roncaglia and Enzo Rotunno and Luca Belsito and Sergio Sapienza and Stefano Frabboni and Rafal E. Dunin-Borkowski and Marco Beleggia and Vincenzo Grillo}, year = {2026}, url = {https://arxiv.org/abs/2602.19730}, note = {Source identifier: 2602.19730} }