@misc{indiciae030a63cf8a48,
  title = {Quantum Simulations for Extreme Ultraviolet Photolithography},
  author = {Tyler D. Kharazi and Stepan Fomichev and Shu Kanno and Takao Kobayashi and Juan Miguel Arrazola and Qi Gao and Torin F. Stetina},
  year = {2026},
  url = {https://arxiv.org/abs/2602.20234},
  note = {Source identifier: 2602.20234}
}